| Patent No. |
Issued Patents |
Products |
| 5,099,881 |
Flow Dividing Structure of Mass Flow Controller |
FC-980, FC-D980, FC-981, FC-D981, |
| 5,187,580 |
High Power Switch-Mode Radio Frequency Amplifier Method and Apparatus |
RFG, Apex®, Litmas, Paramount® |
| 5,251,871 |
Fluid Flow Control Valve and Valve Disk |
FC-980, FC-D980, FC-981, FC-D981, |
| 5,427,669 |
Thin Film DC Plasma Processing System |
Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle Plus |
| 5,523,955 |
System for Characterizing AC Properties of a Processing Plasma |
Z’Scan, Navigator® (selected versions) |
| 5,535,906 |
Multi-Phase DC Plasma Processing System |
Pinnacle® |
| 5,576,939 |
Enhanced Thin Film DC Plasma Power Supply |
Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle® Plus |
| 5,654,679 |
Apparatus for Matching a Variable Load Impedance with an RF Power Generator Impedance |
FTMS |
| 5,718,813 |
Enhanced Reactive DC Sputtering System |
Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle Plus |
| 5,747,935 |
Method and Apparatus for Stabilizing Switch-Mode Powered RF Plasma Processing |
RFG, Apex® |
| 5,897,753 |
Continuous Deposition of Insulating Material Using Multiple Anodes Alternated between Positive and Negative Voltages |
RAS |
| 5,988,210 |
Flow Control Valve Utilizing Sonic Nozzle |
FC-P2000, FC-P201 |
| 6,006,701 |
Vaporizer in a Liquid Material Vaporizing and Feeding Apparatus |
DVD |
| 6,024,844 |
Enhanced Reactive DC Sputtering |
Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle® Plus |
| 6,046,546 |
Stabilizer for Switch-Mode Powered RF Plasma |
RFG, Apex®, Paramount® |
| 6,046,594 |
Method and Apparatus for Monitoring Parameters of an RF Powered Load in the Presence of Harmonics |
Lynx, Z-Scan |
| 6,156,667 |
Methods and Apparatus for Plasma Processing |
Litmas |
| 6,183,605 |
AC Powered System for Continuous Deposition of a Cathode Material |
RAS |
| 6,217,717 |
Periodically Clearing Thin Film Plasma Processing System |
Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle ®Plus |
| 6,229,392 |
High Power Switch-Mode Radio Frequency Amplifier Method and Apparatus |
RFG, Apex, Litmas |
| 6,237,635 |
Exhauster Pressure Control System |
EPV100 |
| 6,291,938 |
Methods and Apparatus for Igniting and Sustaining Inductively Coupled Plasma |
Litmas®® |
| 6,326,584 |
Methods and Apparatus for RF Power Delivery |
Litmas® |
| 6,368,477 |
Adjustable Energy Quantum Thin Film Plasma Processing System |
Pinnacle®, Summit®, Ascent® |
| 6,384,540 |
System for High Power RF Plasma Processing |
Apex® |
| 6,392,210 |
Methods and Apparatus for RF Power Process Operations with Automatic Input Power Control |
Litmas® |
| 6,424,232 |
Method and Apparatus for Matching a Variable Load Impedance with an RF Power Generator Impedance |
FTMS |
| 6,521,099 |
Periodically Clearing Thin Film Plasma Processing System |
Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle® Plus |
| 6,604,493 |
Liquid Material Vaporizing and Feeding Apparatus |
ADS-L |
| 6,617,679 |
Semiconductor Package for Multiple High Power Transistors |
Stealth FET, Apex®, Paramount® |
| 6,661,324 |
Voltage and Current Sensor |
Navigator®, (selected versions), Z-Scan |
| 6,697,265 |
Wide Range DC Power Supply Utilizing Voltage Doubling Output Capacitors and Inductive Choke to Extend Full Power Load Impedance Range |
Pinnacle® (selected versions), Diamond, X-Arc |
| 6,724,148 |
Mechanism for Minimizing Ion Bombardment Energy in a Plasma Chamber |
Xstream |
| 6,791,274 |
An Improved RF Power Control Device for RF Plasma Applications |
Ovation |
| 6,802,366 |
Swage Method for Cooling Pipes |
Xstream, Litmas, Rapid-OE |
| 6,812,648 |
Method of Cleaning Ion Source, and Corresponding Apparatus/System |
Linear Ion Sources |
| 6,819,096 |
Power Measurement Mechanism for a Transformer Coupled Plasma Source |
Xstream |
| 6,822,396 |
Transformer Ignition Circuit for a Transformer Coupled Plasma Source |
Xstream |
| 6,844,802 |
Parallel Core Electromagnetic Device |
Diamond |
| 6,888,313 |
Impedance Matching Network with Termination of Secondary RF Frequencies |
Navigator®(selected versions) |
| 6,927,358 |
Vacuum Seal Protection in a Dielectric Break |
Xstream |
| 6,943,317 |
Apparatus and Method for Fast Arc Extinction with Early Shunting of Arc Current in Plasma |
Summit® |
| 6,946,063 |
Deterioration Resistant Chambers for Inductively Coupled Plasma Production |
Xstream |
| 6,979,980 |
Soft Switching Interleaved Power Converter |
Summit®, Solaron® |
| 7,005,845 |
Power Measurement Mechanism for a Transformer Coupled Plasma Source |
Xstream |
| 7,049,751 |
Termination of Secondary Frequencies in RF Power Delivery |
Navigator® (selected versions) |
| 7,081,598 |
DC-DC Converter with over-voltage protection circuit |
Summit® |
| 7,105,075 |
DC Power Supply Utilizing Real Time Estimation of Dynamic Impedance |
Summit® |
| 7.245,084 |
Transformer Ignition Circuit for a Transformer Coupled Plasma Source |
Xstream |
| 7,289,341 |
Power Supply Adaptive Feed Forward Control Circuit |
Pinnacle (selected versions) |
| 7,305,311 |
Arc Detection and Handling in Radio Frequency Power Applications |
Apex®, Paramount® |
| 7,423,894 |
Interleaved Soft Switching Bridge Power Converter |
Solaron® |
| 7,394,639 |
System and Method for Driving an Industrial Control Device |
Aera® PI-980® |
| 7,445,695 |
Method and System for Conditioning a Vapor Deposition Target |
Ascent® and Summit® |
| 7,468,494 |
Reaction Enhancing Gas Feed for Injecting Gas into a Plasma Chamber |
Xstream |
| 7,547,005 |
System and Method for Delivering Vapor |
Water Delivery System |
| 7,599,163 |
System and Method for Driving an Industrial Control Device |
Aera® PI-980® |
| 7,603,186 |
Adaptive Response Time Closed Loop Control Algorithm |
Aera® PI-980® |
| 7,619,200 |
Device, System and Method for Coupling Multiple Photovoltaic Arrays |
Solaron® |
| 7,619,910 |
Interleaved Soft Switching Bridge Power Converter |
Solaron® |
| 7,624,791 |
Cooling Apparatus for Electronics |
Ovation (selected versions) |
| 7,640,078 |
Multi-Mode Control Algorithm |
Aera® PI-980® |
| 7,651,263 |
Method and Apparatus for Measuring the Temperature of a Gas in a Mass Flow Controller |
Aera® PI-980® |
| 7,761,247 |
Arc Detection and Handling in Radio Frequency Power Applications |
Apex®, Paramount® |
| 7,768,751 |
System and Method for Ground Fault Detection and Interruption |
Solaron® |